Ion beam energy effects on structure and properties of SiOx doped diamond-like carbon films

SiOx doped diamond-like carbon (DLC) films were synthesized by direct ion beam from hexamethyldisiloxane vapor. Effects of ion beam energy were studied. Variation of atomic concentration of the oxygen versus carbon with ion energy has been observed. Raman scattering spectroscopy didn't indicate essential changes in structure of the films deposited at different ion beam energies. The synthesized films were atomically smooth. Depending on the ion energy the refractive index of the SiOx doped diamond-like carbon films varied within 2.1-2.5 and increased with increase of energy. The contact angle with water for all samples was only 61-64°.