Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1660799 | Surface and Coatings Technology | 2007 | 8 Pages |
Abstract
A new method called time-delayed, time-resolved Langmuir probe measurement is used to measure pulsed plasmas to overcome the secondary electron emission during high-voltage pulses. This method has been verified with a good agreement with an in-situ Faraday cup dosimetry technique. The plasma characteristics of the pulsed-mode, non-continuous plasma and continuous plasma with high-voltage pulses are measured and analyzed using this method. The continuous plasma with high-voltage pulses shows higher plasma densities, lower working pressure and pulse voltage, larger and more flexible process windows, and less charging effect.
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Authors
Shu Qin, Allen McTeer,