| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1660840 | Surface and Coatings Technology | 2007 | 4 Pages |
Abstract
Mechanical properties of diamond-like carbon films by an effective addition of negative pulsed high-voltage-bias have been investigated in capacitively coupled CH4/Ar radio-frequency plasma. The results revealed that hardness and elastic modulus of the deposited film, estimated from nano-indentation load-displacement curve for about 1 μm-thick films, increase with the increase of the absolute value of high-voltage VNPHV for VNPHV < 5 kV and then saturate. Elastic recovery R got the highest value (> 90%) at VNPHV = 5 kV.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Y. Ohtsu, H. Noda, C. Nakamura, T. Misawa, H. Fujita, M. Akiyama, C. Diplasu,