| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1661002 | Surface and Coatings Technology | 2008 | 4 Pages |
Abstract
The structure of waves in a microwave-excited plasma reactor using the multi-slotted planar (MSP) antenna is investigated by experimental measurements and numerical analyses. As a result, it is shown that the radial mode number is fixed and equals to 5 in a wide range of the plasma density, and mode jumps of surface wave hardly appear. Mode jumps of surface wave cause the non-uniformity of the plasma density. Therefore, it is considered that the characteristic in the device is an advantage for controlling plasma parameters.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
A. Tsuji, Y. Yasaka, H. Takeno,