Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1661041 | Surface and Coatings Technology | 2008 | 4 Pages |
Abstract
We deposited ZnO thin films at room temperature by RF magnetron sputtering method with home-made targets, and for application tests using these films as transparent conductive oxide (TCO) anodes, wet-chemical etching behaviors of ZnO films were also investigated using various chemicals. In order to fabricate ZnO-based OLED devices, various etchants such as HCl, HNO3, H2SO4 and H3PO4 have been studies for the wet etching of ZnO thin film. In this experiment, we introduced two new different chemicals as etchants, ferric chloride (FeCl3 ∙ 6H2O) and oxalic acid (C2H2O4) which were controlled with various concentrations in ZnO etching process and showed an anisotropy etching shape of ZnO films.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
D.-G. Yoo, S.-H. Nam, M.H. Kim, S.H. Jeong, H.-G. Jee, H.J. Lee, N.-E. Lee, B.Y. Hong, Y.J. Kim, D. Jung, J.-H. Boo,