| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1661763 | Surface and Coatings Technology | 2008 | 5 Pages |
Abstract
Vertically aligned multi-wall carbon nanotubes (CNTs) were grown on Ni/Ti/Si substrate by thermal chemical vapor deposition method in a microwave heating system. The results showed that vertically aligned CNTs could be uniformly grown on a large area substrate of 3 inch diameter. The Ti interlayer couldn't obstruct the interdiffusion of Ni and Si and the inward diffusion of O, Ti and C. The C atoms for CNTs growth were supplied from Ni particles at an early stage and from Ti interlayer at a later stage in the growth process.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Chia-Chih Chuang, Wei-Long Liu, Wen-Jauh Chen, Jin-Hua Huang,