| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1662768 | Surface and Coatings Technology | 2006 | 12 Pages |
Abstract
Based on the measured current and voltage waveforms on the cathodes and the IES at the substrate, a physical model for the ion energy and flux gain during the pulse-off time is proposed. The model is validated through analysis of the ion flux and ion flux rate at the substrate region and by space-resolved IES measurements.
Related Topics
Physical Sciences and Engineering
Materials Science
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Authors
Tamara Moiseev, David C. Cameron,