Nanofabrication and the structure-property analyses of phase-change alloy-ended CNTs

In order to cap the tip cavities of the open-ended carbon nanotubes (CNTs) with the phase-change alloy for potential applications as the nano-resolution storage media, the Co-assisted CNTs were first synthesized by electron cyclotron resonance chemical vapor deposition (ECR-CVD) with H2 and CH4 as the gas sources. Then, the as-grown CNTs were post-treated in H-plasma atmosphere to remove the carbon layers covered on catalysts, and subsequently immersed in HNO3 solution to remove the catalysts from the tips. The open-ended CNTs with a bowl-like-shape tips were followed by coating with a phase-change alloy layer of GeSbTeSn via sputtering process, and then heat treated in vacuum for 30 min to trim the alloy off from the sidewalls of CNTs to obtain the alloy-ended CNTs. The structures and properties in each processing step were characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), Raman spectroscopy and Auger electron spectroscopy (AES).The experimental results show that the well-oriented phase-change alloy-ended CNTs over a large area are fabricated successfully. Furthermore, the Auger analyses show the compositions of the phase-change alloys may be changed from Te-rich to Ge-rich after being capped on the tips of CNTs.