Characterization of Ti + N and Zr ion implanted 316 L stainless steel

In this study, polished 316LSS stainless steel has been implanted with Ti + N and Zr ions at fluence of 2 × 1017 ions/cm2 and 1 × 1017 ions/cm2, respectively. Ion charge state distributions of Ti + N and Zr were measured by time-of-flight spectrometry, and the mean energies of these ions were determined. The Zr concentration profiles were obtained by Rutherford backscattering spectrometry. The range distribution of ions in implanted and unimplanted samples were evaluated using TRIM and STOPPO programs and the results were compared with the experimental data, which were in good agreement. The influence of the ions on the mechanical behavior of the 316LSS was investigated. The measurements show that after Ti + N implantation; the friction coefficient decreases, the hardness value increases, the wear resistance decreases and after Zr implantation; the friction coefficient decreases, the hardness value increases and the wear resistance increases with respect to an unimplanted sample.