| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1663316 | Surface and Coatings Technology | 2006 | 9 Pages |
Abstract
TiSiN nanocomposite coatings were deposited on stainless steel by chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/FBR-CVD) by reaction of TiCl4 and SiCl4 with NH3 at 850 °C. Coatings were characterized by means of GD-OES, XPS and XRD. TiSiN coatings with a Si content of 9 at.% showed a hardness of 28 GPa (the hardness of TiN and SiNx coatings was around 21 GPa) and a lower oxidation rate under dry air at 600 °C. Our results show for the first time that AP/FBR-CVD can be tuned for the deposition of nanocomposite ceramic coatings.
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Authors
J. Perez-Mariano, K.-H. Lau, A. Sanjurjo, J. Caro, D. Casellas, C. Colominas,