Elastic properties of nanolaminar Cr2AlC films and beams determined by in-situ scanning electron microscope bending tests

The mechanical properties of Cr2AlC MAX phase structures were investigated by in-situ bending tests. Freestanding structures such as cantilevers and doubly clamped beams of Cr2AlC were produced. The structures exhibit a Young's modulus of 184 GPa which is close to the value obtained by vibrational measurements. The in-situ bending test allows the determination of the mechanical properties with a lower variance of the measurement results compared to the vibrational measurement. The results are a good starting point for the development of microelectromechanical structures based on MAX phases.