Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1664733 | Thin Solid Films | 2015 | 10 Pages |
Abstract
Sputtered Pd/B4C multilayer coatings for X-ray optical applications were investigated with respect to their long term stability. The samples were studied using X-ray reflectivity and diffraction, in-situ stress monitoring, scanning electron microscopy, transmission electron microscopy, and energy dispersive X-ray spectroscopy. Low d-spacing Pd/B4C multilayers grow with excessive compressive stress and form defects. The presence of oxygen triggers boron depletion and oxidation leading to a significant reduction of the d-spacing and to considerable damage of the layered structure within a few days. Protecting cap layers can slow down the degradation process by orders of magnitude.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Ch. Morawe, R. Supruangnet, J-Ch. Peffen,