Electrical, material and multianalyte-sensitive characteristics of thermal CeO2/SiO2-stacked oxide capacitors

•CeO2/SiO2 stacked sensing membranes were fabricated.•Multiple material characterizations were performed.•Sensing capability could be enhanced by annealing.•Multianalyte sensing could be achieved.

A CeO2/SiO2 stacked sensing membrane annealed on silicon substrate for use in multi-analyte sensing was fabricated. Material properties were evaluated using X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy. Results indicate that an electrolyte–insulator–semiconductor sensor with a double-stacked membrane annealed at 800 °C exhibited good sensing performance with high sensitivity and a low drift rate. Additionally, the sensitivity for various ions of Na+, K+, urea, and glucose was conducted. CeO2/SiO2 sensing membranes show promise future industrial biosensing applications.