Article ID Journal Published Year Pages File Type
1665887 Thin Solid Films 2013 5 Pages PDF
Abstract
We reported the measurements of electron energy probability functions (EEPFs) in helicon discharge using laser Thomson scattering (LTS). A problematic effect in the measurement, the measured signal intensity in the ICCD camera is influenced by the magnetic field of helicon discharge and measurement time, was carefully addressed through this paper. To solve this problem, we proposed a data processing method of LTS named as normalization method in this paper with the justification of application to our helicon discharge. The measured EEPFs showed clear Maxwellian distributions at various conditions (magnetic fields and RF powers) in elastic collision range.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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