Nanotextured and polytetrafluoroethylene-coated superhydrophobic surface

•We developed a process for producing a superhydrophobic surface.•The nanotextured surface was coated with polytetrafluoroethylene.•The water contact angle of the surface was 150° and maintained for 7 weeks.

We produced a superhydrophobic surface by reactive ion etching and polytetrafluoroethylene coating of a silicon substrate. SF6/O2 and a metal mesh were used for the etching, which produced pyramidal nanostructures on the substrate. The sputtering of the polytetrafluoroethylene thin film over the nanotextured substrate created a superhydrophobic surface with a water contact angle greater than 150°, which was maintained for 7 weeks. The fluorinated polymer also exhibited hydrophobicity properties.