| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1666050 | Thin Solid Films | 2013 | 7 Pages |
Abstract
•Complete design of dual rotating polarizer and analyzer is given with details.•Determination of generalized ellipsometric angles is achieved.•Method of analysis of optical signal is given.•Calibration procedure is given.
Theory of a dual rotating polarizer and analyzer ellipsometer is presented in this paper. This instrument with doubly modulated optical signal is designed to perform generalized ellipsometry optical characterization of anisotropic layered systems. In this study, i) configuration of the instrument, ii) calculation of optical signal, iii) processing of the signal to extract Fourier coefficients and then generalized angles, and iv) calibration procedures are presented in details.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Mickaël Gilliot, Aotmane En Naciri,