Stabilization of tetragonal/cubic phase in Fe doped zirconia grown by atomic layer deposition

Article ID	Journal	Published Year	Pages	File Type
1666424	Thin Solid Films	2013	5 Pages	PDF

Abstract

âº Fe doped ZrO2 thin films are grown by atomic layer deposition. âº Fe doping content can be tuned tailoring the Fe to Zr pulse ratio. âº Fe impurities in ZrO2 stabilize the crystalline tetragonal/cubic phase. âº Fe is found in Fe3Â + chemical state, which maximizes the magnetization per atom.

Keywords

X-ray photoemission spectroscopy Spectroscopic ellipsometry Atomic layer deposition Time of flight secondary ion mass spectrometry Thin films X-ray diffraction

Related Topics

Physical Sciences and Engineering Materials Science Nanotechnology

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Stabilization of tetragonal/cubic phase in Fe doped zirconia grown by atomic layer deposition

Authors

A. Lamperti, E. Cianci, R. Ciprian, D. Sangalli, A. Debernardi,