| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1666441 | Thin Solid Films | 2012 | 6 Pages |
Abstract
⺠Magnetron sputtered gas-tight films of Ce0.8Gd0.2O2 achieved on porous substrates ⺠A 4-zone model is derived based on bias power and substrate sintering temperature. ⺠Different microstructures of films deposited are achieved using bias assistance. ⺠Structural analysis of films deposited is provided.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Hyo Jeong Moon, Stefan Baumann, Sven Uhlenbruck, Doris Sebold, Wilhelm Albert Meulenberg, Haiwoong Park,