Article ID Journal Published Year Pages File Type
1666463 Thin Solid Films 2012 8 Pages PDF
Abstract

A deconvolution method that combines nanoindentation testing with finite element analysis was developed to determine elastic modulus of thin films in a film-substrate bilayer system. In this method, an iterative deconvolution approach was developed to optimize the load–displacement curve obtained from a finite element nanoindentation model towards the experimentally measured curve. The method was verified by using SiNx/Si and Ni/Si film/substrate bilayer systems fabricated under different deposition conditions. The results obtained from this method agree very well with those from an empirical method.

► A deconvolution method was developed to determine elastic modulus of thin films. ► It combines nanoindentation testing with finite element optimization algorithm. ► More accurate results were achieved in comparison to other numerical methods. ► The result from the method agrees well with empirical method.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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