| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1666557 | Thin Solid Films | 2012 | 8 Pages |
Abstract
⺠A quasi single source precursor system enables one-step heat treatment of layers. ⺠Thereby less pronounced texture and lower tensile residual stress were obtained. ⺠The layers show hardly any fluctuations in the thickness. ⺠The electrical conductivity could be increased. ⺠Optical performance in terms of transmission (vis) and IR reflection was increased.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
M. Veith, C. Bubel, I. Grobelsek,