Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1666570 | Thin Solid Films | 2012 | 6 Pages |
Abstract
⺠Si doped ZnO thin films by co-sputtering of ZnO and SiO2 targets. ⺠Minimum of resistivity for Si doped ZnO thin films containing 3.9% of Si. ⺠Si and O environments by X-ray Photoelectron Spectroscopy.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
C. Faure, J. Clatot, L. Teulé-Gay, G. Campet, C. Labrugère, M. Nistor, A. Rougier,