| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1666579 | Thin Solid Films | 2012 | 6 Pages |
Abstract
⺠Laminated Ru-Ta coatings consisted of a cyclical gradient concentration. ⺠The as-deposited coatings showed a laminated structure with a period of 4-34 nm. ⺠Internal oxidation of Ru-Ta coatings executed after annealing in 1% O2-Ar atmosphere. ⺠Oxygen inward diffusion was dominated by lattice diffusion.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Yung-I Chen,