Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1666598 | Thin Solid Films | 2012 | 8 Pages |
Abstract
⺠2 wt.% Al doped ZnO (AZO) thin film grown on r-cut sapphire under 33.3 Pa of O2 ⺠Tiled boundary along [1¯102¯]AZO observed as a result of internal lattice strain ⺠Tilted nano-column processed after sequential deposition under vacuum and 33.3 Pa of O2 ⺠Significantly reduced electrical resistivity observed for the films on r-cut sapphire
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Joon Hwan Lee, Tianlin Lu, Sungmee Cho, Fauzia Khatkhatay, Li Chen, Haiyan Wang,