Article ID Journal Published Year Pages File Type
1666598 Thin Solid Films 2012 8 Pages PDF
Abstract
► 2 wt.% Al doped ZnO (AZO) thin film grown on r-cut sapphire under 33.3 Pa of O2 ► Tiled boundary along [1¯102¯]AZO observed as a result of internal lattice strain ► Tilted nano-column processed after sequential deposition under vacuum and 33.3 Pa of O2 ► Significantly reduced electrical resistivity observed for the films on r-cut sapphire
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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