Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1666646 | Thin Solid Films | 2012 | 6 Pages |
Abstract
⺠We study as-deposited and chlorinated porous Ge films oxidized in air. ⺠X-ray photoelectron spectroscopy was used to characterize oxide phases. ⺠A GeOx transition layer grows with logarithmic rate kinetics. ⺠The transition layer oxide phases cease growing once chlorine is removed. ⺠We observe continual growth of GeO2 on the transition layer with time.
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Authors
S.D. Wolter, T. Tyler, N.M. Jokerst,