Article ID Journal Published Year Pages File Type
1666646 Thin Solid Films 2012 6 Pages PDF
Abstract
► We study as-deposited and chlorinated porous Ge films oxidized in air. ► X-ray photoelectron spectroscopy was used to characterize oxide phases. ► A GeOx transition layer grows with logarithmic rate kinetics. ► The transition layer oxide phases cease growing once chlorine is removed. ► We observe continual growth of GeO2 on the transition layer with time.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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