| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1666799 | Thin Solid Films | 2013 | 4 Pages |
Abstract
⺠Coaxial-structured ZnO/silicon nanowire EGFET was demonstrated as pH sensor. ⺠EMD and ALD methods were proposed to fabricate ZnO/silicon nanowires. ⺠ZnO/silicon nanowire EGFET sensor achieved better sensitivity and linearity. ⺠ZnO/silicon nanowire EGFET sensor had good reliability and durability.
Related Topics
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Authors
Hung-Hsien Li, Chi-En Yang, Chi-Chung Kei, Chung-Yi Su, Wei-Syuan Dai, Jung-Kuei Tseng, Po-Yu Yang, Jung-Chuan Chou, Huang-Chung Cheng,