Comparisons of the electrical characteristics by impedance matching conditions on the E–H and H–E transition and the hysteresis of inductively coupled plasma

Different electrical characteristics depending on the impedance matching conditions were observed in inductively coupled plasma during the E–H mode and H–E mode transition and their hysteresis. At the auto matching condition, there was no hysteresis loop on the E–H and H–E transition, while the hysteresis loop was clearly observed at the fixed matching condition. This result shows that the impedance matching condition is the primary cause for the hysteresis loop.