| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1667035 | Thin Solid Films | 2012 | 5 Pages |
Abstract
⺠The exact ratio of ZrB2 and SiC could be obtained by adjusting input gas ratios. ⺠The other condensed phase species could appear under some suitable conditions ⺠The H2 acting as reaction species directly influences the deposition process. ⺠The high H2 input amount is favorable for the co-deposition of ZrB2 and SiC. ⺠The flow rate range of the H2 pump should be increased in the experimental study.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Juanli Deng, Laifei Cheng, Guopeng Zheng, Kehe Su, Litong Zhang,