| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1667049 | Thin Solid Films | 2012 | 6 Pages |
Abstract
⺠Precise depth evaluation of nanoscale multilayer thin film structure of Ta/Si. ⺠Comparison of thickness measured by different surface analytical techniques. ⺠Effect of ion beam induced atomic mixing during depth profiling. ⺠Measurement limitations of different techniques.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
B.R. Chakraborty, S.K. Halder, K.K. Maurya, A.K. Srivastava, V.K. Toutam, M.K. Dalai, G. Sehgal, S. Singh,