| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1667106 | Thin Solid Films | 2012 | 9 Pages |
Abstract
⺠AlNxOy thin films were produced using magnetron sputtering. ⺠AlNxOy film morphology, composition and structure depend on reactive gas pressure. ⺠Electrical properties can be tuned controlling the non metallic/metallic ratio.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
J. Borges, N. Martin, N.P. Barradas, E. Alves, D. Eyidi, M.F. Beaufort, J.P. Riviere, F. Vaz, L. Marques,