| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1667151 | Thin Solid Films | 2012 | 4 Pages |
Abstract
This paper reports on the temperature dependence of the electrical properties of high-k lead–magnesium–niobium titanate thin films processed with different compositions (with and without nanoparticles) and with different annealing temperatures (450 °C and 750 °C). These characterization results support the ongoing investigation of the material's electrical properties which are necessary before the dielectric can be used in silicon-based IC applications.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Wenbin Chen, Kevin G. McCarthy, Mehmet Çopuroğlu, Shane O'Brien, Richard Winfield, Alan Mathewson,