Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1667356 | Thin Solid Films | 2012 | 4 Pages |
Abstract
VC/AlN nanomultilayers with various AlN layer thicknesses have been prepared by multi-target magnetron sputtering. Microstructure evolution and mechanical properties of the multilayers have been investigated. Under the “template effect” of cubic VC, as-deposited amorphous AlN has been crystallized to cubic structure with AlN layer thickness < 1 nm, correspondingly the multilayers exhibit coherent growth and obtain significantly enhanced hardness with the maximum of 40.1 GPa. A further increase of AlN layer thickness causes the formation of amorphous AlN, which blocks the coherent growth of the multilayers, resulting in a rapid decline of hardness.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Guanqun Li, Yuge Li, Geyang Li,