| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1667425 | Thin Solid Films | 2012 | 4 Pages |
Abstract
⺠SnO phase was present in polycrystalline F-doped SnO2 film. ⺠All the films exhibit an (200) preferred orientation. ⺠The minimum residual stress was obtained when samples are heat-treated at 200 °C. ⺠Both intrinsic and thermal stress co-exist and affect the films' residual stress.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Jingkai Yang, Hongli Zhao, Qian Chen, Shengbo Liu, Hesong Sha, Fucheng Zhang,