| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1667468 | Thin Solid Films | 2012 | 7 Pages |
Abstract
⺠Quick solid phase epitaxial regrowth. ⺠Minimum end of range dopant diffusion. ⺠Dopant activation. ⺠Lattice damage repair.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
T.L. Alford, Mandar J. Gadre, Rajitha N.P. Vemuri, N. David Theodore,