Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1667591 | Thin Solid Films | 2011 | 5 Pages |
Abstract
Textured surface boron-doped zinc oxide (ZnO:B) thin films were directly grown via low pressure metal organic chemical vapor deposition (LP-MOCVD) on polyethylene terephthalate (PET) flexible substrates at low temperatures and high-efficiency flexible polymer silicon (Si) based thin film solar cells were obtained. High purity diethylzinc and water vapors were used as source materials, and diborane was used as an n-type dopant gas. P-i-n silicon layers were fabricated at ~ 398 K by plasma enhanced chemical vapor deposition. These textured surface ZnO:B thin films on PET substrates (PET/ZnO:B) exhibit rough pyramid-like morphology with high transparencies (T ~ 80%) and excellent electrical properties (Rs ~ 10 Ω at d ~ 1500 nm). Finally, the PET/ZnO:B thin films were applied in flexible p-i-n type silicon thin film solar cells (device structure: PET/ZnO:B/p-i-n a-Si:H/Al) with a high conversion efficiency of 6.32% (short-circuit current density JSC = 10.62 mA/cm2, open-circuit voltage VOC = 0.93 V and fill factor = 64%).
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Xin-liang Chen, Quan Lin, Jian Ni, De-kun Zhang, Jian Sun, Ying Zhao, Xin-hua Geng,