Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1667988 | Thin Solid Films | 2011 | 8 Pages |
Thin film laminates composed of sputtered indium zinc oxide and silver, optimized for conductance and transparency, were tested for water vapor permeation as well as mechanical durability in tension. The ~ 82 nm thick optimized indium–zinc-oxide/silver/indium–zinc-oxide (IZO/Ag/IZO) films were > 80% transparent in the visible range (400 nm–700 nm) with measured sheet resistances less than 5 Ω/sq. The water vapor permeation measurements using Ca test methods at several temperature/ humidity conditions indicated that the addition of the thin Ag layer provided little improvement relative to a single indium–zinc-oxide (IZO) layer of similar thickness. However, the critical strain in bending tests for IZO/Ag/IZO films was improved compared to IZO films. The modulus (E ~ 113 GPa), hardness (H ~ 7 GPa), fracture toughness (KIC ~ 1.1 MPa⋅m0.5), and interfacial shear (“adhesion”) (τc ~ 16 MPa) of/related to IZO, and measured by nanoindention are consistent with other brittle ceramic thin film materials.