| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1668062 | Thin Solid Films | 2011 | 7 Pages |
An integration strategy is devised for a reliable and scalable assembly of carbon nanotubes in photoresist-derived glassy-like carbon microelectrodes. The approach involves UV photolithography process with carbon nanotube monodispersed photoresist followed by high temperature pyrolysis process, and is versatile in yielding various 3-dimensional micro-nano integrated carbon microelectrode arrays. The morphology of the micro-nano integrated structures is characterized. The integrated microelectrodes demonstrate better electrical performance than the blank microelectrodes, showing potential applications in high-sensitive chemical and biological detection systems. The developed method represents a low-cost and facile way to mass production of carbon nanotube-integrated carbon microelectrode array.
