| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1668153 | Thin Solid Films | 2011 | 5 Pages |
Abstract
The characteristics of the multi-hole electrode RF capacitively coupled plasma are experimented and analyzed. Neon, argon and krypton are discharged with various pressures, powers and electrode hole diameters. The relationship of plasma density and hole diameter of the electrode is compared in various gas plasma discharges. The data can be a reference for the design of a multi-hole electrode for high density RF capacitively coupled plasma discharge.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
H.S. Lee, Y.S. Lee, S.H. Seo, H.Y. Chang,