Modification of AlN thin films morphology and structure by temporally shaping of fs laser pulses used for deposition

We studied the effect of temporally pulse shaping upon the properties of thin layers synthesized by pulsed laser deposition with fs laser pulses generated by a Ti-sapphire laser source. We showed that the film morphology and structure can be gradually modified when applying mono-pulses of different duration or passing to a sequence of two pulses of different intensities.