Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1668388 | Thin Solid Films | 2011 | 5 Pages |
Abstract
Polycrystalline Al2O3 thin films were fabricated through a method combining urea hydrolysis and hydrothermal reactions. The overall growth temperature of these films was achieved as low as 150 °C. Although cracks occurred across the gel film after hydrolysis, a subsequent nucleation under elevated pressure and temperature resulted in a closely packed morphology. Moreover, the hydrothermal treatment led to high oxide content and an increase in crystallinity within the films.
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Authors
XiaoFei Duan, Irving Liaw, Nguyen H. Tran, Robert N. Lamb,