Article ID Journal Published Year Pages File Type
1668388 Thin Solid Films 2011 5 Pages PDF
Abstract
Polycrystalline Al2O3 thin films were fabricated through a method combining urea hydrolysis and hydrothermal reactions. The overall growth temperature of these films was achieved as low as 150 °C. Although cracks occurred across the gel film after hydrolysis, a subsequent nucleation under elevated pressure and temperature resulted in a closely packed morphology. Moreover, the hydrothermal treatment led to high oxide content and an increase in crystallinity within the films.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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