Article ID Journal Published Year Pages File Type
1668681 Thin Solid Films 2011 4 Pages PDF
Abstract

Ultrafast-deposition and a-Si precursor or cap layer are analyzed as possible approaches to the control upon interface intermixing and film growth process. A simple and effective design is delivered providing deposition rates up to 104 nm/s. XPS results evidence formation of Fe3Si in the layered structure Fe/a-Si/Si. Cross-section HRTEM data demonstrate enhanced intermixing at the a-Si/Fe film interface. Magnetic properties of the Fe–Si structures grown by the above methods are studied by in situ magneto-optic Kerr effect. Intermixing at the Fe/Si interface is the result of chemical reaction rather than diffusion.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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