| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1668810 | Thin Solid Films | 2009 | 5 Pages |
Abstract
Fabrication of a bilayer HfO2/single-crystal LiNbO3 film is demonstrated using deep high-energy He+ implantation in a LiNbO3 wafer, followed by HfO2 atomic layer deposition, and, then, selective etching exfoliation from the bulk LiNbO3 crystal. The properties and morphology of these exfoliated bilayer films are characterized using a set of thin-film probes. Pre-exfoliation film patterning and one model application, in surface-refractive-index tuning of guided waves in a free-standing LiNbO3 film, are also demonstrated.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Tsung-Liang Chen, Angela Kou, Avishai Ofan, Ophir Gaathon, R.M. Osgood Jr., Oleg Gang, Lakshmanan Vanamurthy, Sasha Bakhru, Hassaram Bakhru,