Fabrication of platinum microheater on alumina substrate by micro-pen and laser sintering

This paper investigates an alternative method for rapid prototyping and manufacturing of platinum microheaters, in which a micro-pen is used to deposit thick-film platinum paste and laser sintering is employed to pattern the micro-pen-deposited coating. This work aims to enhance the efficiency of microheater fabrication and to reduce platinum-paste waste. The effect of laser power on the microstructure of the platinum microheaters was investigated. Thermal characterization of the microheater was also performed. The microheater can be operated at about 400 °C with a power of 3.55 W. The temperature of the microheater can change from 27 °C to 350 °C in less than 35 s.