Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1669186 | Thin Solid Films | 2009 | 5 Pages |
Abstract
This paper describes an increase in thickness of spin coated layers by using IR-irradiation. Hybrid suspensions with 5 wt.% solid content (80% BaTiO3, 20% ZrO2) are spin coated on platinized silicon wafers. The IR-irradiation increases the evaporation rate and accelerates the aging of the solution. This leads to an increase in viscosity and a faster increase of the solid content, which results in an earlier percolation of the hybrid suspension with more particles remaining on the substrate. Using IR-irradiation, an increase in layer thickness from 71 nm to 242 nm could be achieved in one coating step.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Armin Dellert, Karin Schindler, Andreas Roosen,