Article ID Journal Published Year Pages File Type
1669186 Thin Solid Films 2009 5 Pages PDF
Abstract

This paper describes an increase in thickness of spin coated layers by using IR-irradiation. Hybrid suspensions with 5 wt.% solid content (80% BaTiO3, 20% ZrO2) are spin coated on platinized silicon wafers. The IR-irradiation increases the evaporation rate and accelerates the aging of the solution. This leads to an increase in viscosity and a faster increase of the solid content, which results in an earlier percolation of the hybrid suspension with more particles remaining on the substrate. Using IR-irradiation, an increase in layer thickness from 71 nm to 242 nm could be achieved in one coating step.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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