Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1669310 | Thin Solid Films | 2010 | 4 Pages |
Abstract
The effect of nitrogen flow rate on structure and properties of (Ti,Zr)N thin films was investigated in the study. Two types of (Ti,Zr)N thin films were found with different nitrogen flow rates, one is the single-phase solid solution of (Ti,Zr)N that appeared for nitrogen flow rates of 2-7Â sccm, the other one is the phase of both (Ti,Zr)N and TiZr mixture for the lower nitrogen flow rates of 1Â sccm. The grain size of the films was also determined by X-ray diffraction, and the size was less than 20Â nm. The (Ti,Zr)N films show excellent hardness ranging from 35.5 to 37.5Â GPa with exhibiting (111) preferred orientation.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Yu-Wei Lin, Jia-Hong Huang, Ge-Ping Yu,