| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1669431 | Thin Solid Films | 2010 | 4 Pages |
Abstract
Application of a hyperthermal neutral beam source is one of the candidate methods of reducing plasma induced damage problems. The neutral beam is generated by vertical collisions between energetic ions and a reflector composed of metal. However, it is difficult to measure the neutral angle and energy distribution experimentally. We simulate the hyperthermal neutral beam (HNB) generation using a molecular dynamics algorithm. In order to obtain a low energy neutral beam, ions with various energies are vertically projected onto the reflector surface. A rough surface structure that has been experimentally measured is used for a realistic simulation. The energy distributions are obtained and the ratio of energy of reflected neutral particles agrees with experimental data.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Seung-hoon Park, Suk Jae Yoo, Choong-Seock Chang,