Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1669548 | Thin Solid Films | 2009 | 4 Pages |
Abstract
Cryogenic particle beam is an effective means of removing nano-sized contaminant particles from a substrate. To overcome the current cleaning limit of 50 nm, a particle beam with novel properties – smaller bullet size moving at a higher velocity – was used. Argon or Ar/He mixture was expanded through contoured Laval nozzles of various expansion angles to generate extremely small particles through genuine nucleation and growth. Argon particles smaller than 100 nm – smaller by a factor of 10 or more than the conventional Argon aerosols – were successfully generated, and could perfectly remove various ceramic particles down to 20 nm.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Kwang-seok Hwang, Mi-jeong Lee, Min-young Yi, Jin-Won Lee,