Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1669551 | Thin Solid Films | 2009 | 4 Pages |
Abstract
A novel high-speed, high-sensitivity capacitive-type humidity sensor is fabricated by using a new microfabrication process involving combination of directional and isotropic etching with inductively coupled plasma (ICP) etcher and a localized curing of polyimide films on a micro-hotplate. The polyimide humidity sensor is found to have a sensitivity of 0.75 pF/%RH, a linearity of 0.995, a hysteresis of 1.32%RH, a time response of 3 s, and a temperature coefficient of 0.22%RH/°C. This high-sensitivity and high-speed device is achieved using the locally-cured polyimide and a sensor structure having many holes and allowing moisture to diffuse through the top and side surfaces of polyimide film.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Jae Sung Kim, Myung Jin Lee, Moon-Sik Kang, Kum-Pyo Yoo, Kwang-Ho Kwon, V.R. Singh, Nam Ki Min,