Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1669733 | Thin Solid Films | 2011 | 4 Pages |
Abstract
We report the discovery of a face-centered cubic (Al1−xCrx)2O3 solid solution [0.60 < x < 0.70] in films grown onto Si substrates using reactive radio frequency magnetron sputtering from Al and Cr targets at 400 °C. The proposed structure is NaCl-like with 33% vacancies on the metal sites. The unit cell parameter is 4.04 Å as determined by X-ray diffraction. The films have a <100> preferred crystallographic orientation and exhibit hardness values up to 26 GPa and an elastic modulus of 220–235 GPa.
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Authors
A. Khatibi, J. Palisaitis, C. Höglund, A. Eriksson, P.O.Å. Persson, J. Jensen, J. Birch, P. Eklund, L. Hultman,