Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1670110 | Thin Solid Films | 2008 | 7 Pages |
Fe/Pt multilayers (MLs) with an overall composition Fe52Pt48, deposited by magnetron sputtering on thermally oxidized Si wafer substrates, were post annealed in vacuum at various temperatures (TA) in the range 573–973 K. The MLs transform directly and completely into polycrystalline hard-magnetic FePt thin films with ordered L10 structure above TA = 573 K. The evolution of the microstructure, the order parameter and the stacking fault density with annealing temperature was investigated by ex-situ X-ray diffraction and line-broadening analysis. The average microstrains