Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1670224 | Thin Solid Films | 2010 | 5 Pages |
Abstract
This paper describes that Ge plays an enabler to integrate active photonic devices on a Si platform. In spite of the large lattice mismatch of ~Â 4% between Ge and Si, high-quality Ge layers can be epitaxially grown on Si by ultrahigh-vacuum chemical vapor deposition. Applications of the Ge layers to near-infrared active photonic devices, i.e., photodiodes, optical modulators and light emitters, are described. Several issues on the device physics as well as the integration with Si electronics are discussed.
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Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Yasuhiko Ishikawa, Kazumi Wada,